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Project Title A Scalable n x n Electrochemical Pixel Array with Integrated Electronics for Use as a Highly Parallel Biosensor Device |
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Project # NCB2 |
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Objectives Methods
Summary A U.S. patent application was filed for the electrochemical CMOS pixel array [2]. The electrochemical detectors of the chip are platinized aluminum pads. Electron beam deposition of Pt on the aluminum pads was markedly improved (Fig. 1) using the newly acquired FEI Strata 400 STEM Dual Beam Focused Ion Beamwhich is equipped with both ion beam and electron beam. Electron beam deposition is less damaging to the sample and more defined deposition is possible. For the first time, single vesicle release events from chromaffin cells were recorded On-Chip. Fig. 2 shows the amperometric currents recorded at 700 mV electrode voltage. The noise was at sub pico-ampere level. The trace includes a total of 59 events A typical exocytotic event (at 140s into the recording) has a peak of 40pA, a half width of 16ms and a total charge of 586fC, parameters that are very similar to those obtained with carbon fiber electrodes and conventional amplifiers. A first prototype for a 2-dimensional 100 electrode potentiostat array with (10mm)2 electrodes and 45µm x 25mm pitch was fabricated in 0.5mm AMIS technology. Glutamate detection was achieved on glutamate oxidase modified microelectrodes showing a linear concentration dependence (Fig. 3). A positively charged polymer brush modified surface was shown for the first time to be a very good substrate for neuron culture and growth guidance. Photolithography was used to pattern this cationic polymer brush. In areas between the polymer brushes, the surface was backfilled with a polyethylene glycol (PEG) monolayer. Such polymer brush/PEG hybrid surfaces showed good spatial control of neuron outgrowth. The combination with glutamate detection by surface electrodes from patterned neurons appears feasible. Accomplishments
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Fig.1: Fig.1: (a) Pt deposition on aluminum pads using focused ion beam. A haze of Pt around the electrode can make it difficult to pattern Pt on dense arrays with this method. (b) Platinum deposition on the aluminum pads using the newly acquired FEI Strata 400 STEM Dual Beam Focused Ion Beam which is equipped with both ion beam and electron beam. Electron beam deposition is less damaging to the sample and more defined deposition is possible. |
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Fig.2: (a) Amperometric currents recorded from chromaffin cells placed directly on the e-beam fabricated platinum electrodes on the CMOS die. A total of 59 events were recorded. (b) A typical exocytotic event at 140s into the recording (inset) has a peak of 40pA, a half width of 16ms and a total charge of 586fC. The noise was at sub pico-ampere level. |
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Fig.3: (a) Example of amperometry currents in detecting glutamate at different concentration. (b) A calibration curve of glutamate detection using glutamate oxidase modified microelectrodes shows a linear concentration dependence. |
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