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Profilometer - Veeco 6M

Description

  1. Measures surface profile steps from 100 A to 1 mm deep.
  2. Accepts up to 150 mm (6") substrates up to 5 mm thick.
  3. Step resolution from 1 to 200 A depending on range chosen.
  4. Step repeatability: 10 A for a 1,000 A step.
  5. Scans range from 50 to 30,000 um long.
  6. 12.5 um stylus tip.
  7. Stylus down force adjustable from 1 to 15 mg.
  8. Ceramic vacuum hold down stage.
  9. X-Y stage translation: 20 x 80 mm, rotates 360 degrees.
  10. Photo capability with 70 to 280 X camera (3.5 to 0.86 mm field of view)
  11. Up to 30,000 exportable data points per scan.
  12. Easy to set and store personal scan setting.

Standard Measurements

  1. Roughness parameters: Ra, Rq, Rp, Rv, Rt, Rz, max. Ra, max. dev., skew.
  2. Waviness parameters: Wa, Wq, Wp, Wv, Wt, max.dev.
  3. Step height parameters: avg. step ht., avg. ht., max. peak, max. valley, max. ht., peak to valley, high spot sount, peak count.
  4. Geometry parameters: area, slope, volume, radius, perimeter, bearing, ratio, Sm.
  5. Programmable cutoff filter.

Applications

  1. Metal etch uniformity.
  2. Thin-film stress calculations on small wafers.
  3. Transparent films and photoresist thickness.
  4. Characterization of MEMS development.
  5. Compound semiconductor devices on GaAs wafers.
  6. Microlens height/curvature and V-groove depth.
  7. Roughness on machined parts.
  8. Thin-film and thick-film coatings.
  9. Surface quality and defect review.

 

Instructions for Users: Profilometer - Veeco 6M

Tool Manager: Brian Bowman


    This material is based upon work supported in part by the STC Program of the National Science Foundation under Agreement No. ECS-9876771. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
    Any opininons, findings, conclusions or recommendations expressed are those of the author(s) and do not necessarily reflect the views of the New York State Office of Science, Technology and Academic Research.


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