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CHA Mark 50 e-Beam Evaporator
  1. Thin film deposition system - up to six different layers can be deposited
  2. 32" diameter water-cooled chamber
  3. Rotating or stationary conformal planetary substrate holders with 57 100mm wafer capacity on water-cooled track
  4. Rotating or stationary planetary substrate holder for lift-off with 7 100mm wafer capacity
  5. Heated substrate option with 4 banks of quartz heaters
  6. Metals include: Al,Au,Cr,Ti,Pt,Ni,Cu

    Tool Manager: Brian Bowman

    CHA Operating Instructions - pdf

    CHA Materials Index - pdf
Lift Off Setup
Conformal Setup

This material is based upon work supported in part by the STC Program of the National Science Foundation under Agreement No. ECS-9876771. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Any opininons, findings, conclusions or recommendations expressed are those of the author(s) and do not necessarily reflect the views of the New York State Office of Science, Technology and Academic Research.


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