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AFM DI-3000

• 90µm Square XY imaging area
• 6µm Z Range
• 1% Integral non linearity (XY)
• < 0.05nm RMS vertical noise floor
• Samples up to 150 mm diameter and 12 mm thick
• 150 mm vacuum chuck for hard disks, semiconductor wafers, and other samples;
• Enhanced motorized positioning: 125 x 100 mm inspectable area
• Optical microscope: 150 to 675 µm horizontal viewing area with 1.5 µm resolution
Tool Manager: Kit Umbach

This material is based upon work supported in part by the STC Program of the National Science Foundation under Agreement No. ECS-9876771. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Any opininons, findings, conclusions or recommendations expressed are those of the author(s) and do not necessarily reflect the views of the New York State Office of Science, Technology and Academic Research.


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