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Imaging Ellipsometer - Nanofilm EP3

Tool Manager: Teresa Porri

Imaging ellipsometry (IE) is a powerful tool for measuring thin films of almost any material adsorbed/deposited on a substrate. Materials that can be analyzed are for example: thin metal films, oxides, organic coatings, biological molecule layers (DNA/protein), semiconductor films, SAM's etc.

IE overcomes the spatial resolution problem in normal ellispsometry where an averaged value over the full spotsize is used (typically 50-100 micrometer to >1 mm sized spots). In IE, analysis optics in combination with a CCD camera provide spatial resolution down to 1-2 micrometer and <0.1nm thickess resolution (SiO2 on Si) with a real-time view of the sample, providing the user with unpreceeded measurement control and information on sample homogeniety.

In addition to making measurements on multiple regions of interest (ROI), IE can provide n, k and thickness maps over the full field-of-veiw. Also there is a convenient ROI array creator for DNA/protein arrays or other spatially structured samples.

Accessories
Liquid cell for measurements in fluids using a standard reflective setup - image

SPR/TIR fluid cell for imaging surface plasmon resonance (SPR - requires a gold coated glass slide) and fluid measurments in an inverted setup - image
In the SPR cell the optical path goes through a transparent substrate and reflects of the bottom interface, which is in contact with a liquid. To supplement the fluid cells, there is a kinetic software to facilitate binding studies in real time.

Thermal stage with ramping capability (0.5-6^o C/min) and a high limit of ~110^o C

There is also a stand-alone modeling/analysis software available in the NBTC facility (Thinfilm companion from Semiconsoft). This software make it possible for users to review and evaluate their data without spending time in front of the instrument.

Manuals
NBTC Ellipsometer User Instructions

Thinfilm companion FAQ and Turorial

Application Notes

Nanofilm webpage: www.nanofilm.de

Technical Specifications
Ellipsometer	Auto-Nulling Imaging Ellipsometer in PSCA configuration
Ellipsometric precision and accuracy	Delta/Psi precision 0.002 deg Absolute accuracy 0.1 deg
Thickness relative error (SiO2 on Si)	0.001 nm
Thickness absolute accuracy (SiO2 on Si)	< 0.1 nm
Imaging system	CCD camera with 768 x 572 pixels
Light source	Laser unit: Internal solid state laser, 532 nm Spectroscopic Unit: Xenon Arc lamp with filter wheel (48 interference filters). Wavelengths: 380 – 900 nm, bandwidth +/- 6 nm
Imaging optics	To achieve high-resolution real-time focused images, the Nanofilm EP³ is equipped with an automatic focus scan 10x objective: Field-of-view 0.4 mm, lateral resolution: 2 µm 2x objective: Field-of-view 2.5 mm, lateral resolution: 4 µm
Motorized goniometer	Angle-of-incidence range: 40 – 90 deg. Angle resolution: 0.001 deg. Absolute angle accuracy: 0.01 deg. Speed of motion: ca. 10 deg./second
Automatic sample handling stage	Automatic Sample Alignment: typ. 2 sec/ deg Motorized XYZ stage: travel range 90 mm (X/Y), 3 mm (Z) Repeatability: 1 µm Joystick: MS WingMan
Reflective liquid cell - image	For ellipsometry of solid substrates in liquid. Angle of incidence: 60° Material: PEEK Liquid Volume: < 0.4 ml Windows: AR-coated glass Sample size: minimum15 x 22 mm
SPR/TIR liquid cell - image	Liquid cell for ellipsometry of transparent substrates and/or SPR measurements. Material: PEEK Liquid volume: < 100 µl Sample size: minimum15 x 22 mm
EP³ View Software:	Automation: * Powerful macro language EP³script allows the user to simplify complex measurements into push-button operation * User-programmable function buttons * X/Y stages controlled via software Image Processing: * AutoScan for optimum full field-of-view images * Real-time geometrical correction for angle-dependent image aspect ratio * Image formats supported: TIFF, JPG, PNG * Image browser Analysis: * Multiple region-of-interest (ROI) * Micro Mapping for high-res maps of Delta/Psi, thickness, refractive index etc. * Optical modelling package for simulation and analysis of thin film systems, supports multiple-angle, multiple-wavelength and spectroscopic analysis * Export data to external software packages for analysis or visualization * Kinetic software add-on for evaluation of binding events

This material is based upon work supported in part by the STC Program of the National Science Foundation under Agreement No. ECS-9876771. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Any opininons, findings, conclusions or recommendations expressed are those of the author(s) and do not necessarily reflect the views of the New York State Office of Science, Technology and Academic Research.

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