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Excimer Laser Microfabrication

First Scribing Results - SEM Micrographs
Substrate: Silcion


Stage Speed: 0.125 mm/sec

Stage Speed: 0.2 mm/sec

Stage Speed: 0.3 mm/sec

Stage Speed: 0.5 mm/sec

Stage Speed: 1.0 mm/sec

Last updated: January 27, 2002

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This material is based upon work supported in part by the STC Program of the National Science Foundation under Agreement No. ECS-9876771. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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